arXiv · 1106.6274
Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation
Abstract
The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated.
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Cornelius Thiele, Michael Engel, Frank Hennrich, Manfred M. Kappes, Klaus-Peter Johnsen, Carl G. Frase, Hilbert v. Löhneysen, Ralph Krupke. 2011-06-30. Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation. https://doi.org/10.1063/1.3656736
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