arXiv · 1111.3545
Integrated TiO2 resonators for visible photonics
Abstract
We demonstrate waveguide-coupled titanium dioxide (TiO2) racetrack resonators with loaded quality factors of 2x10^4 for the visible wavelengths. The structures were fabricated in sputtered TiO2 thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser. Devices based on this material could serve as integrated optical elements as well as passive platforms for coupling to visible quantum emitters.
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Jennifer T. Choy, Jonathan D. B. Bradley, Parag B. Deotare, Ian B. Burgess, Christopher C. Evans, Eric Mazur, Marko Loncar. 2011-11-15. Integrated TiO2 resonators for visible photonics. https://doi.org/10.1364/ol.37.000539
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