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arXiv · 1201.0637

Sub-Rayleigh lithography using high flux loss-resistant entangled states of light

Shamir Rosen·Itai Afek·Yonatan Israel·Oron Ambar·Yaron Silberberg
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Abstract

Quantum lithography achieves phase super-resolution using fragile, experimentally challenging entangled states of light. We propose a scalable scheme for creating features narrower than classically achievable, with reduced use of quantum resources and consequently enhanced resistance to loss. The scheme is an implementation of interferometric lithography using a mixture of an SPDC entangled state with intense classical coherent light. We measure coincidences of up to four photons mimicking multiphoton absorption. The results show a narrowing of the interference fringes of up to 30% with respect to the best analogous classical scheme using only 10% of the non-classical light required for creating NOON states.

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Shamir Rosen, Itai Afek, Yonatan Israel, Oron Ambar, Yaron Silberberg. 2012-01-03. Sub-Rayleigh lithography using high flux loss-resistant entangled states of light. https://doi.org/10.1103/physrevlett.109.103602

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