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arXiv · 1208.6147

Calculation of thermal parameters of SiGe microbolometers

A. V. Voitsekhovskii·D. V. Grigoryev·V. A. Yuryev·S. N. Nesmelov
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Abstract

The thermal parameters of a SiGe microbolometer were calculated using numerical modeling. The calculated thermal conduction and thermal response time are in good agreement with the values found experimentally and range between 2x10$^-7$ and 7x10$^-8$ W/K and 1.5 and 4.5 ms, respectively. High sensitivity of microbolometer is achieved due to optimization of the thermal response time and thermal conduction by fitting the geometry of supporting heat-removing legs or by selection of a suitable material providing boundary thermal resistance higher than 8x10$^-3$ cm$^2$K/W at the SiGe interface.

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A. V. Voitsekhovskii, D. V. Grigoryev, V. A. Yuryev, S. N. Nesmelov. 2012-08-30. Calculation of thermal parameters of SiGe microbolometers. https://doi.org/10.1007/s11182-008-9015-4

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