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arXiv · 1302.4812

A real-time beam current density meter

Junliang Liu·Deyang Yu·Fangfang Ruan·Yingli Xue·Wei Wang
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Abstract

We have developed a real-time beam current density meter for charged particle beams. It measures the mean current density by collimating a uniform and large diameter primary beam. The suppression of the secondary electrons and the deflection of the beam were simulated, and it was tested with a 105 keV Ar7+ ion beam.

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Junliang Liu, Deyang Yu, Fangfang Ruan, Yingli Xue, Wei Wang. 2013-02-20. A real-time beam current density meter. https://doi.org/10.1063/1.4795400

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