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arXiv · 1303.6477

High-precision Absolute Coordinate Measurement using Frequency Scanned Interferometry

Tianxiang Chen·Haijun Yang·Keith Riles·Cheng Li
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Abstract

In this paper, we report high-precision absolute position measurement performed with frequency scanned interferometry (FSI). We reported previously on measurement of absolute distance with FSI [1]. Absolute position is determined by several related absolute distances measured simultaneously. The achieved precision of 2-dimensional measurements is better than 1 micron, and in 3-dimensional measurements, the precision on X and Y is confirmed to be below 1 micron, while the confirmed precision on Z is about 2 microns, where the confirmation is limited by the lower precision of the moving stage in Z direction.

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Tianxiang Chen, Haijun Yang, Keith Riles, Cheng Li. 2013-03-26. High-precision Absolute Coordinate Measurement using Frequency Scanned Interferometry. https://arxiv.org/abs/1303.6477

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