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arXiv · 1304.5381

Niobium-based superconducting nano-devices fabrication using all-metal suspended masks

S. Samaddar·D. van Zanten·A. Fay·B. Sacépé·H. Courtois·C. B. Winkelmann
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Abstract

We report a novel method for the fabrication of superconducting nanodevices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.

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S. Samaddar, D. van Zanten, A. Fay, B. Sacépé, H. Courtois, C. B. Winkelmann. 2013-04-19. Niobium-based superconducting nano-devices fabrication using all-metal suspended masks. https://doi.org/10.1088/0957-4484%2F24%2F37%2F375304

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