arXiv · 1305.0557
A general procedure for thermomechanical calibration of nano/micro-mechanical resonators
Abstract
We provide a detailed description of a general procedure by which a nano/micro-mechanical resonator can be calibrated using its thermal motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a detailed derivation of the corresponding power spectral density (PSD) function. The effective masses for a number of different resonator geometries are determined using both finite element method (FEM) modeling and analytical calculations.
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B. D. Hauer, C. Doolin, K. S. D. Beach, J. P. Davis. 2013-05-02. A general procedure for thermomechanical calibration of nano/micro-mechanical resonators. https://doi.org/10.1016/j.aop.2013.08.003
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