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arXiv · 1309.1834

Nanomechanical resonant structures in single-crystal diamond

Michael J. Burek·Daniel Ramos·Parth Patel·Ian W. Frank·Marko Lončar
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Abstract

With its host of outstanding material properties, single-crystal diamond is an attractive material for nanomechanical systems. Here, the mechanical resonance characteristics of freestanding, single-crystal diamond nanobeams fabricated by an angled-etching methodology are reported. Resonance frequencies displayed evidence of significant compressive stress in doubly clamped diamond nanobeams, while cantilever resonance modes followed the expected inverse-length-squared trend. Q-factors on the order of 104 were recorded in high vacuum. Results presented here represent initial groundwork for future diamond-based nanomechanical systems which may be applied in both classical and quantum applications.

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Michael J. Burek, Daniel Ramos, Parth Patel, Ian W. Frank, Marko Lončar. 2013-09-07. Nanomechanical resonant structures in single-crystal diamond. https://doi.org/10.1063/1.4821917

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