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arXiv · 1402.6647

Scanning capacitance microscopy using a relaxation oscillator

Marie Pahlmeyer·Andrew Hankins·Sam Tuppan·Woo-Joong Kim
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Abstract

We have performed scanning capacitance microscopy using a relaxation oscillator. Precision calibrations indicate a sensitivity on the order of 0.05 pF. Surface topography of metallic structures, such as machined grooves and coins, can be readily obtained either in the constant-height (non-contact) or tapping (contact) mode. Spatial resolution of sub-50 $\mu$m has been achieved.

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Marie Pahlmeyer, Andrew Hankins, Sam Tuppan, Woo-Joong Kim. 2014-02-25. Scanning capacitance microscopy using a relaxation oscillator. https://doi.org/10.1119/1.4899045

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