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arXiv · 1411.3639

Fabrication of Triangular Nanobeam Waveguide Networks in Bulk diamond Using Single-Crystal Silicon Hard Masks

I. Bayn·S. Mouradian·L. Li·J. A. Goldstein·T. Schröder·J. Zhang·E. H. Chen·O. Gaathon·M. Lu·A. Stein·C. A. Ruggiero·J. Salzman·R. Kalish·D. Englund
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Abstract

A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q=2.51x10^6) photonic crystal cavities with low mode volume (Vm=1.062x({\lambda}/n)^3), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q=3x103.

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I. Bayn, S. Mouradian, L. Li, J. A. Goldstein, T. Schröder, J. Zhang, E. H. Chen, O. Gaathon, M. Lu, A. Stein, C. A. Ruggiero, J. Salzman, R. Kalish, D. Englund. 2014-11-13. Fabrication of Triangular Nanobeam Waveguide Networks in Bulk diamond Using Single-Crystal Silicon Hard Masks. https://doi.org/10.1063/1.4902562

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