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arXiv · 1501.05793

Fast Characterization of Moving Samples with Nano-Textured Surfaces

Morten Hannibal Madsen·Poul-Erik Hansen·Maksim Zalkovskij·Mirza Karamehmedović·Jørgen Garnæs
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Abstract

We characterize nano-textured surfaces by optical diffraction techniques using an adapted commercial light microscope with two detectors, a CCD camera and a spectrometer. The acquisition and analyzing time for the topological parameters height, width, and sidewall angle is only a few milliseconds of a grating. We demonstrate that the microscope has a resolution in the nanometer range, also in an environment with many vibrations, such as a machine floor. Furthermore, we demonstrate an easy method to find the area of interest with the integrated CCD camera.

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Morten Hannibal Madsen, Poul-Erik Hansen, Maksim Zalkovskij, Mirza Karamehmedović, Jørgen Garnæs. 2015-01-23. Fast Characterization of Moving Samples with Nano-Textured Surfaces. https://doi.org/10.1364/optica.2.000301

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