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arXiv · 1503.06617

hp-finite element method for simulating light scattering from complex 3D structures

S. Burger·L. Zschiedrich·J. Pomplun·S. Herrmann·F. Schmidt
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Abstract

Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.

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S. Burger, L. Zschiedrich, J. Pomplun, S. Herrmann, F. Schmidt. 2015-03-23. hp-finite element method for simulating light scattering from complex 3D structures. https://doi.org/10.1117/12.2085795

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