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arXiv · 1511.03741

Construction and Characterization of a Frequency-Controlled, Picometer-Resolution, Displacement Encoder-Actuator

John P. Koulakis·Michael Stein·Karoly Holczer
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Abstract

We have constructed an actuator/encoder whose generated displacement is controlled through the resonance frequency of a microwave cavity. A compact, 10-micrometer-range, digitally-controlled actuator executing frequency-coded displacement with picometer resolution is described. We consider this approach particularly suitable for metrologic-precision scanning probe microscopy.

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John P. Koulakis, Michael Stein, Karoly Holczer. 2015-11-12. Construction and Characterization of a Frequency-Controlled, Picometer-Resolution, Displacement Encoder-Actuator. https://doi.org/10.1063/1.4950778

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