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arXiv · 1512.05097

Diffraction effects in length measurements by laser interferometry

Carlo Paolo Sasso·Enrico Massa·Giovanni Mana
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Abstract

High-accuracy dimensional measurements by laser interferometers require corrections because of diffraction, which makes the effective fringe-period different from the wavelength of a plane (or spherical) wave $\lambda_0$. By using a combined X-ray and optical interferometer as a tool to investigate diffraction across a laser beam, we observed wavelength variations as large as $10^{-8}\lambda_0$. We show that they originate from the wavefront evolution under paraxial propagation in the presence of wavefront- and intensity-profile perturbations.

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Carlo Paolo Sasso, Enrico Massa, Giovanni Mana. 2015-12-16. Diffraction effects in length measurements by laser interferometry. https://doi.org/10.1364/oe.24.006522

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