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arXiv · 1612.04279

SU-8 clamped CVD graphene drum resonators

Sunwoo Lee·Changyao Chen·Vikram V. Deshpande·Gwan-Hyoung Lee·Ilkyu Lee·Michael Lekas·Alexander Gondarenko·Young-Jun Yu·Kenneth Shepard·Philip Kim·James Hone
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Abstract

Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition (CVD) graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, this resonator is highly strained, indicating its potential in strain engineering for performance enhancement.

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Sunwoo Lee, Changyao Chen, Vikram V. Deshpande, Gwan-Hyoung Lee, Ilkyu Lee, Michael Lekas, Alexander Gondarenko, Young-Jun Yu, Kenneth Shepard, Philip Kim, James Hone. 2016-12-13. SU-8 clamped CVD graphene drum resonators. https://doi.org/10.1063/1.4793302

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