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arXiv · 1702.03003

An instrument for advanced in situ x-ray studies of metal-organic vapor phase epitaxy of III-nitrides

Guangxu Ju·Matthew J. Highland·Angel Yanguas-Gil·Carol Thompson·Jeffrey A. Eastman·Hua Zhou·Sean M. Brennan·G. Brian Stephenson·Paul H. Fuoss
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Abstract

We describe an instrument that exploits the ongoing revolution in synchrotron sources, optics, and detectors to enable in situ studies of metal-organic vapor phase epitaxy (MOVPE) growth of III-nitride materials using coherent x-ray methods. The system includes high-resolution positioning of the sample and detector including full rotations, an x-ray transparent chamber wall for incident and diffracted beam access over a wide angular range, and minimal thermal sample motion, giving the sub-micron positional stability and reproducibility needed for coherent x-ray studies. The instrument enables surface x-ray photon correlation spectroscopy, microbeam diffraction, and coherent diffraction imaging of atomic-scale surface and film structure and dynamics during growth, to provide fundamental understanding of MOVPE processes.

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Guangxu Ju, Matthew J. Highland, Angel Yanguas-Gil, Carol Thompson, Jeffrey A. Eastman, Hua Zhou, Sean M. Brennan, G. Brian Stephenson, Paul H. Fuoss. 2017-02-09. An instrument for advanced in situ x-ray studies of metal-organic vapor phase epitaxy of III-nitrides. https://doi.org/10.1063/1.4978656

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