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arXiv · 1705.02807

Systematic efficiency study of line-doubled zone plates

Felix Marschall·Joan Vila-Comamala·Vitaliy A. Guzenko·Christian David
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Abstract

Line-doubled Fresnel zone plates provide nanoscale, high aspect ratio structures required for efficient high resolution imaging in the multi-keV x-ray range. For the fabrication of such optics a high aspect ratio HSQ resist template is produced by electron-beam lithography and then covered with Ir by atomic layer deposition (ALD).

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Felix Marschall, Joan Vila-Comamala, Vitaliy A. Guzenko, Christian David. 2017-05-08. Systematic efficiency study of line-doubled zone plates. https://doi.org/10.1016/j.mee.2017.01.017

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