Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry

Samuel Gleason; Jonathan Manton; Janet Sheung; Taylor Byrum; Cody Jensen; Lingyun Jiang; Joseph Dvorak; Ignace Jarrige; Peter Abbamonte

arXiv · 1707.08639

Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry

Samuel Gleason·Jonathan Manton·Janet Sheung·Taylor Byrum·Cody Jensen·Lingyun Jiang·Joseph Dvorak·Ignace Jarrige·Peter Abbamonte

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Abstract

We introduce a method for using Fizeau interferometry to measure the intrinsic resolving power of a diffraction grating. This method is more accurate than traditional techniques based on a long-trace profiler (LTP), since it is sensitive to long-distance phase errors not revealed by a d-spacing map. We demonstrate 50,400 resolving power for a mechanically ruled XUV grating from Inprentus, Inc.

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Samuel Gleason, Jonathan Manton, Janet Sheung, Taylor Byrum, Cody Jensen, Lingyun Jiang, Joseph Dvorak, Ignace Jarrige, Peter Abbamonte. 2017-07-27. Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry. https://arxiv.org/abs/1707.08639

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