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arXiv · 1708.03809

An Early In-Situ Stress Signature of the AlN-Si Pre-growth Interface for Successful Integration of Nitrides with (111) Si

Hareesh Chandrasekar·Nagaboopathy Mohan·Abheek Bardhan·KN Bhat·Navakanta Bhat·N Ravishankar·Srinivasan Raghavan
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Abstract

The integration of MOCVD grown group III-A nitride device stacks on Si (111) substrates is critically dependent on the quality of the first AlN buffer layer grown. A Si surface that is both oxide-free and smooth is a primary requirement for nucleating such layers. A single parameter, the AlN layer growth stress, is shown to be an early (within 50 nm), clear (<0.5 GPa versus >1 GPa) and fail-safe indicator of the pre-growth surface, and the AlN quality required for successful epitaxy. Grain coalescence model for stress generation is used to correlate growth stress, the AlN-Si interface and crystal quality.

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Hareesh Chandrasekar, Nagaboopathy Mohan, Abheek Bardhan, KN Bhat, Navakanta Bhat, N Ravishankar, Srinivasan Raghavan. 2017-08-12. An Early In-Situ Stress Signature of the AlN-Si Pre-growth Interface for Successful Integration of Nitrides with (111) Si. https://doi.org/10.1063/1.4831968

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