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arXiv · 1710.00666

Micromechanical microphone using sideband modulation of nonlinear resonators

Joseph A. Boales·Farrukh Mateen·Pritiraj Mohanty
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Abstract

We report the successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270$\times$96-$\mu$m resonator was shown to be reliable in audio detection for sound intensity levels as low as ambient room noise and to have an unamplified sensitivity of 23.9 $\mu$V/Pa. Such an approach may be adapted in acoustic sensors and microphones for consumer electronics or medical equipment such as hearing aids.

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Joseph A. Boales, Farrukh Mateen, Pritiraj Mohanty. 2017-09-22. Micromechanical microphone using sideband modulation of nonlinear resonators. https://doi.org/10.1063/1.4996993

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