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arXiv · 1711.11358

Nanoladder cantilevers made from diamond and silicon

M. Héritier·A. Eichler·Y. Pan·U. Grob·I. Shorubalko·M. D. Krass·Y. Tao·C. L. Degen
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Abstract

We present a "nanoladder" geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size $\sim$ 100 nm. Compared to a rectangular beam of the same dimensions, the mass and spring constant of a nanoladder are each reduced by roughly two orders of magnitude. We demonstrate a low force noise of $158 (+62)(-42)\,$zN and $190 (+42)(-33)\,$zN in a one-Hz bandwidth for devices made from silicon and diamond, respectively, measured at temperatures between 100--150 mK. As opposed to bottom-up mechanical resonators like nanowires or nanotubes, nanoladder cantilevers can be batch-fabricated using standard lithography, which is a critical factor for applications in scanning force microscopy.

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M. Héritier, A. Eichler, Y. Pan, U. Grob, I. Shorubalko, M. D. Krass, Y. Tao, C. L. Degen. 2017-11-30. Nanoladder cantilevers made from diamond and silicon. https://doi.org/10.1021/acs.nanolett.7b05035

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