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arXiv · 1805.05647

Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light

Sten A. Reijers·Dmitry Kurilovich·Francesco Torretti·Hanneke Gelderblom·Oscar O. Versolato
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Abstract

We present and experimentally validate a model describing the sensitivity of the tilt angle, expansion and propulsion velocity of a tin micro-droplet irradiated by a 1 μm Nd:YAG laser pulse to its relative alignment. This sensitivity is particularly relevant in industrial plasma sources of extreme ultraviolet light for nanolithographic applications. Our model has but a single parameter: the dimensionless ratio of the laser spot size to the effective size of the droplet, which is related to the position of the plasma critical density surface. Our model enables the development of straightforward scaling arguments in turn enabling precise control the alignment sensitivity.

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Sten A. Reijers, Dmitry Kurilovich, Francesco Torretti, Hanneke Gelderblom, Oscar O. Versolato. 2018-09-02. Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light. https://doi.org/10.1063/1.5026950

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