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arXiv · 1806.00099

Lithium niobate micro-disk resonators of quality factors above 10^7

Rongbo Wu·Jianhao Zhang·Ni Yao·Wei Fang·Lingling Qiao·Zhifang Chai·Jintian Lin·Ya Cheng
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Abstract

We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.

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Rongbo Wu, Jianhao Zhang, Ni Yao, Wei Fang, Lingling Qiao, Zhifang Chai, Jintian Lin, Ya Cheng. 2018-05-16. Lithium niobate micro-disk resonators of quality factors above 10^7. https://doi.org/10.1364/ol.43.004116

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