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arXiv · 1807.06099

Nanomechanical resonators for cryogenic research

T. Kamppinen·V. B. Eltsov
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Abstract

Suspended aluminium nanoelectromechanical resonators have been fabricated, and the manufacturing process is described in this work. Device motion is driven and detected with a magnetomotive method. The resonance response has been measured at 4.2 K temperature in vacuum and low pressure $^4$He gas. At low oscillation amplitudes the resonance response is linear, producing Lorentzian line shapes, and Q-values up to 4400 have been achieved. At higher oscillation amplitudes the devices show nonlinear Duffing-like behavior. The devices are found to be extremely sensitive to pressure in $^4$He gas. Such device is a promising tool for studying properties of superfluid helium.

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T. Kamppinen, V. B. Eltsov. 2018-07-12. Nanomechanical resonators for cryogenic research. https://doi.org/10.1007/s10909-018-02124-z

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