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arXiv · 1807.06836

Observation of extreme-ultraviolet light emission from an expanding plasma jet with multiply-charged argon or xenon ions

A. G. Shalashov·A. V. Vodopyanov·I. S. Abramov·A. V. Sidorov·E. D. Gospodchikov·S. V. Razin·N. I. Chkhalo·N. N. Salashchenko·M. Yu. Glyavin·S. V. Golubev
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Abstract

We report the first direct demonstration of possibility to generate the extreme ultraviolet (EUV) radiation with a freely expanding jet of dense plasma with multiply-charged ions supported by high-power microwaves. The detected emission power is about 20 W at 18--50 nm for argon and xenon and 0.3 W at 13--17 nm for xenon. The discharge with a peak electron density up to $3\times 10^{16}\,$cm$^{-3}$ and a characteristic size of $150\,μ$m is supported by a focused radiation of a recently developed gyrotron with unique characteristics, 250~kW output power at 250~GHz, operating in a relatively long (50$\,μ$s) pulse mode. Up-scaling of these experimental results gives grounds for development of a point-like kilowatt-level EUV source for a high-resolution lithography able to fulfill requirements of the microelectronics industry.

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A. G. Shalashov, A. V. Vodopyanov, I. S. Abramov, A. V. Sidorov, E. D. Gospodchikov, S. V. Razin, N. I. Chkhalo, N. N. Salashchenko, M. Yu. Glyavin, S. V. Golubev. 2018-07-19. Observation of extreme-ultraviolet light emission from an expanding plasma jet with multiply-charged argon or xenon ions. https://doi.org/10.1063/1.5049126

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