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arXiv · 1810.00945

Enhanced quantum efficiency and reduction of reflection for MSM photodetectors with nano-structured surface

Ekaterina Ponizovskaya Devine·Yang Gao·Cesar Perez·Toshishige Yamada·Aly F. Elrefaie·M. Saif Islam·Shih-Yuan Wang
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Abstract

The photon trapping nano-structures help to enhance quantum efficiency and reduce reflection for MSM photodetector that allows fast Si photodetectors at wavelength 800-950nm. The nanostructure consist of micro holes reduces reflection and bends normally incident light into the lateral modes in the absorbing layer.

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Ekaterina Ponizovskaya Devine, Yang Gao, Cesar Perez, Toshishige Yamada, Aly F. Elrefaie, M. Saif Islam, Shih-Yuan Wang. 2018-08-29. Enhanced quantum efficiency and reduction of reflection for MSM photodetectors with nano-structured surface. https://arxiv.org/abs/1810.00945

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