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arXiv · 1810.02892

MEMS approach to low-frequency broadband acoustic metamaterials

Lixiang Wu·Quansheng Sun·Qifa Zhou·Gaofeng Wang
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Abstract

We experimentally demonstrate a simple micro-electro-mechnical systems (MEMS) approach to acoustic metamaterials and have observed the average increase of nearly 6 dB beyond the classic law for sound attenuation at low frequencies from 200 Hz to 1200 Hz. Here, we have also found that the MEMS metastructure, especially the cavity-backed micromembrane, contributes to 22.3% gain of sound transmission loss (STL) with a fill factor of perforation of less than 7.6%.

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Lixiang Wu, Quansheng Sun, Qifa Zhou, Gaofeng Wang. 2018-10-05. MEMS approach to low-frequency broadband acoustic metamaterials. https://arxiv.org/abs/1810.02892

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