Direct micro-structuring of Si(111) surfaces through nanosecond-laser Bessel beams

Abstract

We present here a nanosecond laser ablation of Si(111) wafer with diffraction-free (Bessel-$J_0$) beams. First, the Axicon a conical shaped optical element for beam shaping is characterized with a visible and infrared light sources. Then, ablation profiles are obtained with Bessel beams generated for $α=1^{\circ}$ and $α=20^{\circ}$ base angles, then they are characterized via a Scanning Electron, an Atomic Force and an Optical Interferometric Microscopes. Experimental results compared with theoretical predictions obtained by using Bessel functions. Results show that Bessel beams give possibility of straightforward micro-structuring of Si(111) samples because the only central spot of Bessel beams could damage the surface provided that the laser pulse energy becomes in energy-range we found in our experiments. Moreover, our results clearly indicate that reduced HAZ area due to thermal expansion in ns pulse regime are natural outcome of Bessel beams as opposed to Gauss beams of same spot size. Lastly, nanosecond pulses indicate two-ablation regimes regarding the pulse energy, the quality of structures can be enhanced by using high quality Gauss beams ($M^{2}\approx1$) and the size of fabricated structures can be much reduced by using larger base angle of Axicon (such as $α=40^{\circ}$) in our scheme.