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arXiv · 2102.06644

A Novel Nano Tomography Setup for Material Science and Engineering Applications

Dominik Müller·Jonas Graetz·Andreas Balles·Simon Stier·Randolf Hanke·Christian Fella
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Abstract

In a comprehensive study on several samples we demonstrate for our laboratory-based computed tomography system resolutions down to 150nm. The achieved resolution is validated by imaging com-mon test structures in 2D and Fourier Shell Correlation of 3D volumes. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, ageing in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of com-posites. Thus, our laboratory system provides the unique possibility to image non-destructively struc-tures in the range of hundred nanometers, even for high density materials.

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Dominik Müller, Jonas Graetz, Andreas Balles, Simon Stier, Randolf Hanke, Christian Fella. 2021-02-12. A Novel Nano Tomography Setup for Material Science and Engineering Applications. https://arxiv.org/abs/2102.06644

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