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arXiv · 2109.02913

MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets

Federico Maspero·Gabriele Gatani·Simone Cuccurullo·Riccardo Bertacco
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Abstract

A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented.

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Federico Maspero, Gabriele Gatani, Simone Cuccurullo, Riccardo Bertacco. 2021-09-07. MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets. https://doi.org/10.1109/mems51782.2021.9375441

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