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arXiv · 2202.12161

Line-field Coherent Sensing with LED Illumination

Celalettin Yurdakul·David S. Millar·Hassan Mansour·Pu Wang·Keisuke Kojima·Toshiaki Koike-Akino·Kieran Parsons·Philip V. Orlik
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Abstract

We describe a method of low-coherence interferometry based optical profilometry using standard light-emitting diode (LED) illumination and complementary metal-oxide-semiconductor (CMOS) image sensors. A line-field illumination strategy allows for the simultaneous measurement of many points in space. Micron scale accuracy and resolution are achieved and demonstrated using a variety of targets.

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Celalettin Yurdakul, David S. Millar, Hassan Mansour, Pu Wang, Keisuke Kojima, Toshiaki Koike-Akino, Kieran Parsons, Philip V. Orlik. 2022-02-24. Line-field Coherent Sensing with LED Illumination. https://arxiv.org/abs/2202.12161

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