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arXiv · 2203.06054

3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis

Aodong Zhang·Jian Xu·Yucen Li·Ming Hu·Zijie Lin·Yunpeng Song·Jia Qi·Wei Chen·Zhaoxiang Liu·Ya Cheng
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Abstract

We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in-situ melting, for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV LEDs irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.

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Aodong Zhang, Jian Xu, Yucen Li, Ming Hu, Zijie Lin, Yunpeng Song, Jia Qi, Wei Chen, Zhaoxiang Liu, Ya Cheng. 2022-03-09. 3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis. https://doi.org/10.3390/mi13040543

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