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arXiv · 2208.12192

Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing

Zhibo Li·Jack A. Smith·Mark Scullion·Nils Kolja Wessling·Loyd J. McKnight·Martin D. Dawson·Michael J. Strain
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Abstract

The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. An all-pass ring resonator transmission spectrum was obtained in the 1.5 {\mu}m to 1.6 {\mu}m wavelength range, with a measured loaded Q-factor larger than 32000.

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Zhibo Li, Jack A. Smith, Mark Scullion, Nils Kolja Wessling, Loyd J. McKnight, Martin D. Dawson, Michael J. Strain. 2022-08-25. Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing. https://doi.org/10.1364/ome.474200

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