Phononic graded meta-MEMS for elastic wave amplification and filtering

Federico Maspero; Jacopo Maria De Ponti; Luca Iorio; Annachiara Esposito; Riccardo Bertacco; Andrea di Matteo; Alberto Corigliano; Raffaele Ardito

arXiv · 2306.12076

Phononic graded meta-MEMS for elastic wave amplification and filtering

Federico Maspero·Jacopo Maria De Ponti·Luca Iorio·Annachiara Esposito·Riccardo Bertacco·Andrea di Matteo·Alberto Corigliano·Raffaele Ardito

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Abstract

Inspired by recent graded metamaterials designs, we create phononic arrays of micro-resonators for frequency signal amplification and wave filtering. Leveraging suspended waveguides on a thick silicon substrate, we hybridize surface Rayleigh and Lamb flexural waves to effectively achieve phononic signal control along predefined channels. The guided waves are then spatially controlled using a suitable grading of the micro-resonators, which provide high signal-to-noise ratio and simultaneously create phononic delay-lines. The proposed device can be used for sensing, wave filtering or energy harvesting.

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Federico Maspero, Jacopo Maria De Ponti, Luca Iorio, Annachiara Esposito, Riccardo Bertacco, Andrea di Matteo, Alberto Corigliano, Raffaele Ardito. 2023-06-21. Phononic graded meta-MEMS for elastic wave amplification and filtering. https://arxiv.org/abs/2306.12076

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