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arXiv · 2307.01914

Millimeter-Wave Reflectionless Filters Using Advanced Thin-Film Fabrication

Matthew Morgan·Seng Loo·Tod Boyd·Miho Hunter
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Abstract

We report on the development of millimeter-wave, lumped-element reflectionless filters using an advanced thin-film fabrication process. Based on previously demonstrated circuit topologies capable of achieving 50{\Omega} impedance match at all frequencies, these circuits have been implemented at higher frequencies than ever before by leveraging a thin-film process with better than 2 {\mu}m feature size and integrated elements such as SiN Metal-Insulator-Metal (MIM) capacitors, bridges, and TaN Thin-Film Resistors (TFRs).

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Matthew Morgan, Seng Loo, Tod Boyd, Miho Hunter. 2023-07-04. Millimeter-Wave Reflectionless Filters Using Advanced Thin-Film Fabrication. https://arxiv.org/abs/2307.01914

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