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arXiv · 2307.12974

Wide Field-of-View, Large-Area Long-wave Infrared Silicon Metalenses

Hung-I Lin·Jeffrey Geldmeier·Erwan Baleine·Fan Yang·Sensong An·Ying Pan·Clara Rivero-Baleine·Tian Gu·Juejun Hu
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Abstract

Long-wave infrared (LWIR, 8-12 $\mu m$ wavelengths) is a spectral band of vital importance to thermal imaging. Conventional LWIR optics made from single-crystalline Ge and chalcogenide glasses are bulky and fragile. The challenge is exacerbated for wide field-of-view (FOV) optics, which traditionally mandates multiple cascaded elements that severely add to complexity and cost. Here we designed and experimentally realized a LWIR metalens platform based on bulk Si wafers featuring 140$^\circ$ FOV. The metalenses, which have diameters exceeding 4 cm, were fabricated using a scalable wafer-level process involving photolithography and deep reactive ion etching. Using a metalens-integrated focal plane array, we further demonstrated wide-angle thermal imaging.

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Hung-I Lin, Jeffrey Geldmeier, Erwan Baleine, Fan Yang, Sensong An, Ying Pan, Clara Rivero-Baleine, Tian Gu, Juejun Hu. 2023-07-24. Wide Field-of-View, Large-Area Long-wave Infrared Silicon Metalenses. https://arxiv.org/abs/2307.12974

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