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arXiv · 2403.19382

Structured illumination microscopy with extreme ultraviolet pulses

R. Mincigrucci·E. Paltanin·J. -S. Pelli-Cresi·F. Gala·E. Pontecorvo·L. Foglia·D. De Angelis·D. Fainozzi·A. Gessini·D. S. P. Molina·O. Stranik·F. Wechsler·R. Heintzmann·G. Ruocco·F. Bencivenga·C. Masciovecchio
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Abstract

The relentless pursuit of understanding matter at ever-finer scales has pushed optical microscopy to surpass the diffraction limit and produced the super-resolution microscopy which enables visualizing structures shorter than the wavelength of light. In the present work, we harnessed extreme ultraviolet beams to create a sub-{\mu}m grating structure, which was revealed by extreme ultraviolet structured illumination microscopy. This achievement marks the first step toward extending such a super-resolution technique into the X-ray regime, where achieving atomic-scale resolution becomes a charming possibility.

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R. Mincigrucci, E. Paltanin, J. -S. Pelli-Cresi, F. Gala, E. Pontecorvo, L. Foglia, D. De Angelis, D. Fainozzi, A. Gessini, D. S. P. Molina, O. Stranik, F. Wechsler, R. Heintzmann, G. Ruocco, F. Bencivenga, C. Masciovecchio. 2024-03-28. Structured illumination microscopy with extreme ultraviolet pulses. https://arxiv.org/abs/2403.19382

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