Calibrated absolute optical contrast for high-throughput characterization of horizontally aligned carbon nanotube arrays

Abstract

Horizontally aligned carbon nanotube (HACNT) arrays hold significant potential for various applications in nanoelectronics and material science. However, their high-throughput characterization remains challenging due to the lack of methods with both high efficiency and high accuracy. Here, we present a novel technique, Calibrated Absolute Optical Contrast (CAOC), achieved through the implementation of differential principles to filter out stray signals and high-resolution calibration to endow optical contrast with physical significance. CAOC offers major advantages over previous characterization techniques, providing consistent and reliable measurements of HACNT array density with high throughput and non-destructive assessment. To validate its utility, we demonstrate wafer-scale uniformity assessment by rapid density mapping. This technique not only facilitates the practical evaluation of HACNT arrays but also provides insights into balancing high throughput and high resolution in nanomaterial characterization.