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arXiv · 2410.14217

Polygon-based unified Fourier-modal approach for diffractive optics simulations

K. V. Nikolaev·V. Soltwisch·M. A. Botchev·A. Fernández Herrero·P. Hönicke·F. Scholze·S. N. Yakunin
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Abstract

In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shape. In this approach, the gratings line profile is approximated as a polygon. This proves to be convenient since such an approach does not rely on the geometry model of the grating. We test the new approach against other computational theories and a synchrotron scattering experiment.

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BibTeXRIS

K. V. Nikolaev, V. Soltwisch, M. A. Botchev, A. Fernández Herrero, P. Hönicke, F. Scholze, S. N. Yakunin. 2024-10-18. Polygon-based unified Fourier-modal approach for diffractive optics simulations. https://doi.org/10.1103/n2qj-l886

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