arXiv · 2411.03946
Optomechanical microgear cavity
Abstract
We introduce a novel optomechanical microgear cavity for both optical and mechanical isotropic materials, featuring a single etch configuration. The design leverages a conjunction of phononic and photonic crystal-like structures to achieve remarkable confinement of both optical and mechanical fields. The microgear cavity we designed in amorphous silicon nitride exhibits a mechanical resonance at 4.8 GHz, and whispering gallery modes in the near-infrared, with scattering-limited quality factors above the reported material limit of up $10^7$. Notably, the optomechanical photoelastic overlap contribution reaches 75% of the ideal configuration seen in a floating ring structure.
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Roberto O. Zurita, Cauê M. Kersul, Nick J. Schilder, Gustavo S. Wiederhecker, Thiago P. Mayer Alegre. 2024-11-06. Optomechanical microgear cavity. https://arxiv.org/abs/2411.03946
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