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arXiv · 2412.15710

Active nitrogen flux measurement during GaN growth based on the transmitted signal detected with a pyrometer

Matteo Canciani·Stefano Vichi·Oksana Koplak·Sergio Bietti·Stefano Sanguinetti
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Abstract

A novel approach for the measurement of the Nitrogen active species generated by a plasma source in the molecular beam epitaxy environment is here presented. The method is based on the analysis of the variations in the optical signal measured by a pyrometer during a two step, Gallium rich and Nitrogen controlled, growth modes. The method permits a precise, quantitative and direct measurement of the flux of active species as a function of the plasma generation parameters of the cell: nitrogen gas flux and RF-power.

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Matteo Canciani, Stefano Vichi, Oksana Koplak, Sergio Bietti, Stefano Sanguinetti. 2024-12-20. Active nitrogen flux measurement during GaN growth based on the transmitted signal detected with a pyrometer. https://arxiv.org/abs/2412.15710

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