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arXiv · 2506.10602

Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)

Indrani Bhattacharya·Marcus Petz·Rainer Tutsch
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Abstract

We present a simple and novel technique for interferometric surface measurement using a Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) as phase shifter and wavefront-compensator simultaneously. In comparison to a mechanical piezo-based phase shifter measurement, speed and measurement range can be increased by this approach.

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Indrani Bhattacharya, Marcus Petz, Rainer Tutsch. 2025-06-12. Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM). https://arxiv.org/abs/2506.10602

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