Shallow Au Implantation Into Silicon-On-Insulator Slot Ring Resonator Waveguide Devices

Quan-Shan Liu; Maddison Coke; Alexander Lincoln; William Wren; Tim Echtermeyer; Iain Crowe; Richard J Curry

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arXiv · 2509.13876

Shallow Au Implantation Into Silicon-On-Insulator Slot Ring Resonator Waveguide Devices

Quan-Shan Liu·Maddison Coke·Alexander Lincoln·William Wren·Tim Echtermeyer·Iain Crowe·Richard J Curry

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Abstract

The optical transmission spectra of a series of micro-ring resonators (MRRs) are studied following the implantation of gold (Au) ions and subsequent thermal annealing, at temperatures between 500 {\deg}C and 700 {\deg}C. Whilst we find that this process leads to the ready formation of Au nanoparticles (NPs) on the MRR surface, the cavity optical properties; Q-factor and extinction ratio (ER) are severely degraded, for annealing between 500 {\deg}C and 600 {\deg}C, but recover again for annealing at 650 {\deg}C. For an equivalent (control) MRR, which received no Au implantation, thermal annealing alone was also found to degrade the cavity performance.

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Quan-Shan Liu, Maddison Coke, Alexander Lincoln, William Wren, Tim Echtermeyer, Iain Crowe, Richard J Curry. 2025-09-17. Shallow Au Implantation Into Silicon-On-Insulator Slot Ring Resonator Waveguide Devices. https://arxiv.org/abs/2509.13876

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