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arXiv · 2511.05864

Compressive multi-beam scanning transmission electron microscopy

Akira Yasuhara·Takumi Sannomiya·Ryoichi Horisaki
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Abstract

We demonstrate a multi-beam scanning transmission electron microscopy (STEM) imaging that integrates down-sampling with super-resolution image reconstruction via a compressive sensing framework. A custom condenser aperture with six randomly positioned circular holes is employed to produce a multi-beam STEM probe, with the beam shape and distribution tuned through defocus. While the raw multi-beam images exhibit overlapping patterns, reconstruction using Adam optimization and total variation normalization yields high-fidelity images that closely reproduce the original sample structures, even from substantially down-sampled data. The proposed approach offers a pathway toward significant acceleration of such techniques through multibeam sparse sampling and computational reconstruction potentially useful for the analytical scanning methods in general.

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Akira Yasuhara, Takumi Sannomiya, Ryoichi Horisaki. 2025-11-08. Compressive multi-beam scanning transmission electron microscopy. https://doi.org/10.1016/j.ultramic.2026.114353

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