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arXiv · 2601.18043

FinLN: 3D Fin Lithium Niobate Acoustic Resonators

Haorui Ni·Sunil Bhave
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Abstract

We demonstrate a three-dimensional fin lithium niobate (FinLN) acoustic resonator fabricated from thick lithium niobate on insulator using deep ion etching and sidewall electrode patterning. The FinLN geometry enables strong three-dimensional acoustic confinement and enhanced electromechanical coupling while maintaining a compact device footprint. The fabricated devices operate near 300 MHz and exhibit an effective electromechanical coupling coefficient of 6.2% with a mechanical quality factor of 430, in good agreement with finite-element simulations. Compared to planar surface acoustic wave resonators fabricated on the same wafer, the FinLN configuration achieves an 1.8x enhancement in effective coupling. This work establishes FinLN as a promising platform for compact, high-performance RF MEMS and piezo-optomechanical systems.

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Haorui Ni, Sunil Bhave. 2026-01-25. FinLN: 3D Fin Lithium Niobate Acoustic Resonators. https://arxiv.org/abs/2601.18043

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