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arXiv · 2606.13961

An integrated ultrahigh vacuum cluster tool for diamond surface science and single nitrogen-vacancy center measurements

Zhiyang Yuan·Sorawis Sangtawesin·Lila V. H. Rodgers·Kalliope Zervas·James J. Allred·Jared Rovny·Patryk Gumann·Nathalie P. de Leon
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Abstract

We present a custom-designed ultrahigh vacuum (UHV) cluster tool developed for studying shallow nitrogen-vacancy (NV) centers in diamond, enabling in situ diamond surface preparation, characterization, and single NV center dynamics measurements within a single connected platform. The system combines a surface science chamber for controlled surface modification and analysis with a cryogenic confocal microscope chamber dedicated to NV spin and optical measurements. This integrated approach enables a direct correlation between diamond surface chemistry and the resulting NV spin and charge properties. The instrument provides a versatile platform for systematic studies of surface-induced decoherence mechanisms and charge dynamics for shallow NV centers, and establishes a pathway toward reproducible surface engineering for quantum sensing applications.

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Zhiyang Yuan, Sorawis Sangtawesin, Lila V. H. Rodgers, Kalliope Zervas, James J. Allred, Jared Rovny, Patryk Gumann, Nathalie P. de Leon. 2026-06-11. An integrated ultrahigh vacuum cluster tool for diamond surface science and single nitrogen-vacancy center measurements. https://arxiv.org/abs/2606.13961

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