Periodically poled lithium niobate with submicrometer periodicity using electric-field poling technique

Yuchen Zhang; Sanbing Li; Shengbo Song; Xitan Xu; Xudong Tong; Rui Yang; Meiyu Liu; Jiangdong Sun; Feng Gao; Fang Bo; Jingjun Xu; Guoquan Zhang

arXiv · 2611.05009

Periodically poled lithium niobate with submicrometer periodicity using electric-field poling technique

Yuchen Zhang·Sanbing Li·Shengbo Song·Xitan Xu·Xudong Tong·Rui Yang·Meiyu Liu·Jiangdong Sun·Feng Gao·Fang Bo·Jingjun Xu·Guoquan Zhang

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Abstract

A series of monocrystalline lithium niobate (LN) thin films on low-resistivity silicon (LNOS) substrates, with thicknesses ranging from micrometers down to tens of nanometers, were prepared through chemical-mechanical polishing of pristine crystal films. By employing the electric-field poling technique, high-quality periodically poled lithium niobate (PPLN) structures with submicrometer periodicity were fabricated in these LNOSs, and full-thickness polarization reversal beneath the poling electrodes with a well-defined depth profile was achieved. The coercive field was found to follow the Kay-Dunn scaling law, while the lateral domain broadening generally increased with increasing film thickness, and it remained approximately constant across different electrode linewidths at a given film thickness. PPLN structures with periods ranging from 6 $μ$m down to 200 nm were demonstrated. These findings provide guidance for poling electrode design and lateral domain broadening pre-compensation, offering a practical route toward scalable domain engineering in LN thin films with promising potential for compact and highly integrated nonlinear photonic devices.

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Yuchen Zhang, Sanbing Li, Shengbo Song, Xitan Xu, Xudong Tong, Rui Yang, Meiyu Liu, Jiangdong Sun, Feng Gao, Fang Bo, Jingjun Xu, Guoquan Zhang. 2026-11-03. Periodically poled lithium niobate with submicrometer periodicity using electric-field poling technique. https://arxiv.org/abs/2611.05009

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