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Direct X-ray Imaging of $μ$m precision using Back-Illuminated CCD

E. Miyata·M. Miki·H. Tsunemi·J. Hiraga·H. Kouno·K. Miyaguchi
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Abstract

A charge-coupled device (CCD) is a standard imager in optical region in which the image quality is limited by its pixel size. CCDs also function in X-ray region but with substantial differences in performance. An optical photon generates only one electron while an X-ray photon generates many electrons at a time. We developed a method to precisely determine the X-ray point of interaction with subpixel resolution. In particular, we found that a back-illuminated CCD efficiently functions as a fine imager. We present here the validity of our method through an actual imaging experiment.

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E. Miyata, M. Miki, H. Tsunemi, J. Hiraga, H. Kouno, K. Miyaguchi. 2002-04-01. Direct X-ray Imaging of $μ$m precision using Back-Illuminated CCD. https://doi.org/10.1143/jjap.41.l500

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