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Local gating of carbon nanotubes

M. J. Biercuk·N. Mason·C. M. Marcus
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Abstract

Local effects of multiple electrostatic gates placed beneath carbon nanotubes grown by chemical vapor deposition (CVD) are reported. Single-walled carbon nanotubes were grown by CVD from Fe catalyst islands across thin Mo "finger gates" (150 x 10nm). Prior to tube growth, several finger gates were patterned lithogrpahically and subsequently coated with a patterned high-k dielectric using low-temperature atomic layer deposition. Transport measurements demonstrate that local finger gates have a distinct effect from a global backgate.

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M. J. Biercuk, N. Mason, C. M. Marcus. 2003-08-24. Local gating of carbon nanotubes. https://doi.org/10.1021/nl034696g

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